FEI Tecnai G² F20 S-TWIN HR(S)TEM

FEI Tecnai G² F20 S-TWIN HR(S)TEM

FEI Tecnai G² F20 is a 200kV field emission gun (FEG) high resolution and analytical TEM/STEM. The field emission source means this microscope is ideal for applications requiring high coherency, high brightness at high magnification, or small focused probes. It is a versatile and flexible microscope and combines high performance in TEM, EFTEM and STEM modes with ease of operation in a multi-user research environment.

Technical characteristics:

• Acceleration voltage: 80, 120, 200 kV
• Super Twin lens (point resolution : 0.24 nm ; lattice resolution: 0.10 nm)
• Sample holders:
  • Single tilt (±40^o)
  • Low background Be double tilt (±40^o)
  • High tilt tomography (±80^o)
• STEM unit with:
  • Off-axis HAADF detector 
  • On-axis BF/DF2/DF4 detector
• EDAX super ultra-thin window (SUTW) X-ray detector with 136 eV resolution (chemical analysis down to Be)
• Gatan Imaging Filter (GIF) Quantum SE 963 fitted with a 2k x 2k CCD camera to produce energy filtered images (EFTEM), filtered diffraction patterns and EELS spectra
• Gatan 2k x 2k US1000P CCD camera installed above the GIF
• EDS and EELS spectrum imaging capabilities to produce line scans and elemental maps
• Tomography: software for TEM and STEM acquisition (Xplore3D), alignment and reconstruction (Inspect3D) and visualisation (ResolveRT)
• Low dose exposure technique
• Photomontage
• TrueImage for focal series acquisition and reconstruction

 

FEI Magellan 400L XHR SEM

FEI Magellan 400L XHR SEM

The Magellan 400L is a Field Emission Scanning Electron Microscope equipped with a newly developed electron column wieh UC (UniColore) Technology. This microscope features excellent capabilities in the more traditional high energy (15-30 kV) SEM and STEM imaging, but also has an outstanding performance at low beam energies with subnanometer resolution for unmatched surface sensitive imaging.

 

Technical characteristics:

• Landing energies: 50 V to 30 kV, continuously adjustable
• Beam current: 0.6 pA – 22 nA
• Resolution: 0.8 nm@ 15 kV, 0.9 nm @ 1 kV
• Beam energy spread below 0.2 eV
• Detector systems:
  • Secondary electrons: Everhart-Thornley and through-lens (TLD)
  • Back-scattered electrons: TLD and retractable vCD (for BSED at low voltages)
  • Transmitted electrons (STEM): BF, DF and HAADF
• Sample holder kit including cross-sectional, multi-stub and STEM holders
• Beam deceleration to enhance low kV performance
• 5-axis high precision specimen stage 100 mm x 100 mm with piezo control
• Navigation camera
• Integrated plasma cleaner

 

FEI Quanta 650FEG ESEM 

FEI Quanta 650FEG ESEM

The Quanta 650 FEG is a versatile field scanning electron microscope which provides high resolution imaging at low-vacuum and also extended vacuum (environmental) for the characterization of all type of samples (conductive and non-conductive) and performing in-situ dynamic experiments. This microscope features a large chamber compatible with 8 inches wafers.

Technical characteristics:

• Voltage: 200 V to 30 kV 
• Beam current: up to 200 nA 
• Resolution: 
  • High-vacuum mode: 1.2 nm @ 30 kV (SED) // 0.8 nm @ 30 kV (STEM) 
  • Low-vacuum mode: 1.4 nm @ 30 kV (SED) 
  • Extended-vacuum (environmental) mode: 1.4 nm @ 30 kV 
• Sample holder kit including cross-sectional, multi-stub and STEM holders 
• Beam deceleration to enhance low kV performance 
• Detection systems: 
  • Secondary electrons: Everhart-Thornley, gaseous SE (ESEM mode), Through-lens (TLD) 
  • Back-scattered electrons: low kV solid state BSED 
  • Transmitted electrons (STEM): BF and DF 
• EDS analysis using an Inca 250 SSD XMax20 detector which is Peltier cooled with 20 mm2 active area and 129 eV resolution 
• Peltier stage for humidity cycling experiments 
• Heating stage up to 1000ºC